Abstract
Piezomotors have been widely used for motion generation with long stroke and fine resolution, where stick-slip mode features a high motion velocity but a low load capacity, inchworm mode has a high load capacity but a low motion velocity, and scan mode is able to realize super-high resolution but less travel range. Combining these motion modes to achieve a well-rounded piezomotor is challengeable but significant. In this study, a piezomotor with multiple motion modes is proposed. A compliant mechanism with a parallelogram mechanism and lever-type amplifiers is designed to realize various motion modes and adjust the contact force, which has a significant impact on motion performance. To prevent the backward motion and slippage during motion, two power-function based driving signals are designed and analyzed for stick-slip mode and inchworm mode, respectively. A prototype of the designed piezomotor was fabricated to validate the feasibility. According to the experiment results, the maximum motion velocity is 3.24 mm/s, the load capacity is 7.85 N, and the most fine displacement resolution is 10 nm. The proposed methodology is applicable to other types of multi-mode piezomotors.
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