Abstract
A micro chlorine gas sensor with an inner-circulation diffuser pump is newly developed. The sensor based on electro-chemical principle, only has the size of one-tenth in comparison with the conventional one. The sensor consists of an air–liquid separation membrane, a PZT-driven diffuser pump and micro electrodes which were manufactured by micro machining. The inner-circulation is generated by driving the diffuser pump with trapped air working as a buffer, in order to preserve the condition of internal reagent. The properties of the sensor were evaluated by circulation rate of the pump, pressure-proof of the membrane, and responsibility to chlorine gas.
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