Abstract
At present, piezoelectric sensors are primarily applied in health monitoring areas. They may fall off owing to the adhesive’s durability, and even damage the monitored equipment. In this paper, a piezoelectric film sensor (PFS) based on a positive piezoelectric effect (PPE) is presented and a ZnO film is deposited on a GH4169 superalloy steel (GSS) substrate using magnetron sputtering. The microstructure and micrograph of ZnO piezoelectric thin films were analyzed by an X-ray diffractometer (XRD), energy dispersive spectrometer (EDS), scanning electron microscope (SEM), and atomic force microscope (AFM). The results showed that the surface morphology was dense and uniform and had a good c-axis-preferred orientation. According to the test results of five piezoelectric sensors, the average value of the longitudinal piezoelectric coefficient was 1.36 pC/N, and the average value of the static calibration sensitivity was 19.77 mV/N. We selected the sensor whose parameters are closest to the average value for the dynamic test experiment and we drew the output voltage response curve of the piezoelectric film sensor under different loads. The measurement error was 4.03% when repeating the experiment six times. The research achievements reveal the excellent performance of the piezoelectric film sensor directly deposited on a GH4169 superalloy steel substrate. This method can reduce measurement error caused by the adhesive and reduce the risk of falling off caused by the aging of the adhesive, which provides a basis for the research of smart bolts and guarantees a better application in structural health monitoring (SHM).
Highlights
Piezoelectric sensors have been widely applied in structural health monitoring to improve the safety and reliability of structures and to reduce life-cycle costs [1–3]
A ZnO piezoelectric film sensor was developed on a GH4169 superalloy steel substrate successfully
Via SME, energy dispersive spectrometer (EDS), and X-ray diffractometer (XRD), we analyzed the deposited quality of NiCr, ZnO, and SiO2 films by magnetron sputtering technology
Summary
Piezoelectric sensors have been widely applied in structural health monitoring to improve the safety and reliability of structures and to reduce life-cycle costs [1–3]. The above research results have shown that ZnO piezoelectric film sensors have a mature application in the MEMS field, and it has revealed that ZnO has good compatibility with Si, SiO2 , Cu, etc. The use of an adhesive between the sensors and the monitored mechanism increases the measurement error To solve this problem, Chang et al fabricated a wind-power generator based on ZnO piezoelectric films by an RF magnetron sputtering system. We deposited a ZnO piezoelectric film sensor on a GH4169 superalloy steel substrate by magnetron sputtering and achieved the coupling relationship of piezoelectricity and mechanical stress. We deposited a ZnO piezoelectric film sensor on a GH4169 superalloy steel substrate by magnetron sputtering and achieved the coupling relationship of piezoof 17 electricity and mechanical stress.
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