Abstract
TiN thin layers have been deposited on mould and die steel STD11 by ion beam assisted deposition (IBAD) process and the wear behaviour of the TiN-coated steel has been evaluated. The synthesis of the TiN film has been performed by irradiation of nitrogen or Xe ions under various nitrogen partial pressures with in situ Ti evaporation at an accelerating voltage range from 25 to 40 keV below 200 °C. TiN coating by Xe irradiation was more effective in enhancing the surface hardness and wear resistance. The formation behaviour and mechanical properties of TiN films synthesized by the IBAD process are discussed with Auger electron spectroscopy, X-ray diffraction and other analysis data. In addition, the performance of TiN coatings on precision moulds and dies in semiconductor manufacturing lines is also discussed.
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