Abstract
A smart spectral imaging detection method based on the integration of an electrically tunable liquid-crystal Fabry-Pérot microstructure and a focal plane array is discussed. The layout of the spectral device is designed effectively and prototypes with working wavelengths in the range of 800 to 900 nm were fabricated using ultraviolet photolithography and wet etching. Measurements were carried out with careful analysis. Based on the results, this paper proposes a smart spectral imaging array device structure that can potentially obtain the image of many spectral bands simultaneously in one picture frame. Some key issues concerning such structures for imaging applications and calibration are discussed. Without any mechanical parts, this kind of spectral component exhibits some advantages such as low cost and compact integration.
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