Abstract
A large-aperture, long-pulse XeCl excimer laser has been used to generate a soft-X-ray plasma source. Several laser optical configurations have been employed to optimise X-ray emission, including positive-branch unstable resonators and injection by seeding the gain region of the laser with a small commercial excimer laser, resulting in power densities in the range 1012–1014 W cm−2. The characteristics of the plasma source for each different laser configuration and for different target materials are investigated. The most suitable source conditions (spectral energy distribution, time duration, etc.) for specific applications are discussed.
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