Development and calibration of a compact self-sensing atomic force microscope head for micro-nano characterization

Abstract

A compact self-sensing atomic force microscope (AFM) head is developed for the micro-nano dimensional measurement. This AFM head works in tapping mode equipped with a commercial self-sensing probe. This kind of probe can benefit not only from the tuning fork's stable resonant frequency and high quality factor but also from the silicon cantilever's reasonable spring constant. The head is convenient to operate by its simplicity of structure, since it does not need any optical detector to measure the bending of the cantilever. The compact structure makes the head ease to combine with other measuring methods. According to the probe’s characteristics, a method is proposed to quickly calculate the cantilever’s resonance amplitude through measuring its electro-mechanical coupling factor. An experiment system is established based on the nano-measuring machine (NMM) as a high precision positioning stage. Using this system, the approach/retract test is carried out for calibrating the head. The tests can be traced to the meter definition by interferometers in NMM. Experimental results show that the non-linearity error of this AFM head is smaller than 1%, the sensitivity reaches 0.47nm/mV and the measurement stroke is several hundreds of nanometers.