Abstract
Three types of one-sided actuating piezoelectric micropumps are studied in this paper. In the first type, one-sided actuating micropump with two check valves can enhance the flow rate and prevent the back flow in suction mode to keep the flow in one direction. Furthermore, the frequency modulator is applied in the micropump to adjust and promote the maximum flow rate higher than 5.0 mL/s. In the second type, valveless micropump with secondary chamber shows that the secondary chamber plays a key role in the application of the valveless micropump. It not only keeps the flow in one direction but also makes the flow rate of the pump reach 0.989 mL/s. In addition, when a nozzle/diffuser element is used in valveless micropump, the flow rate can be further improved to 1.183 mL/s at a frequency of 150 Hz. In the third type, piezoelectric actuating pump is regarded as an air pump in the application of a microfuel cell system, which can increase more air inlet to improve the fuel/air reaction and further increase the performance of fuel cell.
Highlights
In recent years, micropump plays a significant role in many fields, in chemical, medical, and thermal managements
If a nozzle/diffuser element is applied with a secondary chamber, Smart Materials Research the flow rate can be improved to 1.183 mL/s at 150 Hz [16]
In order to improve the reliability of micropump, Ma et al [16] developed the mechanism and experimental study of valveless micropump with secondary chamber
Summary
Micropump plays a significant role in many fields, in chemical, medical, and thermal managements. Displacement pumps use the moving mechanical part to change the volume of the chamber, such as the one-sided actuating diaphragm pumps. The first prototype of a valveless pump consisting of a circular cylindrical volume where the top had a thin brass diaphragm to which a piezoelectric disc was fixed and its flow rate was 0.26 mL/s [3]. Ma et al [13, 14] developed a one-sided actuating piezoelectric micropump with two check valves to drive liquid for the application on cooling system. In 2011, valveless micropump with two chambers has been developed to actuate fluid at a higher flow rate in one direction by adding a secondary chamber. If a nozzle/diffuser element is applied with a secondary chamber, Smart Materials Research the flow rate can be improved to 1.183 mL/s at 150 Hz [16]. The piezoelectric pump is regarded as an air pump in the application of a microfuel cell system, which can pump more inlet air to increase the fuel/air reaction and further increase the performance of fuel cell
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