Abstract
Abstract Zeolite A (LTA)-coated micromachined sensors have been prepared and used in the sensing of individual gases (H 2 , CH 4 , C 2 H 5 OH, C 3 H 8 and CO, in the 10–1000 ppm range) and gas mixtures. Unlike previous works with conventional sensors, a hydrothermal synthesis was not used to prepare a zeolite film. Instead, a zeolite coating was formed on top of the Pd/SnO 2 surface by microdropping from a zeolite suspension. In spite of this, the response of the sensor with zeolite is significantly different from that of unmodified sensors, and essentially reproduces the performance of zeolite-coated conventional sensors. By avoiding the use of a hydrothermal synthesis the integrity of the sensor is better preserved, and the resulting non-continuous zeolite film has the added advantage of a strong reduction in response times.
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