Abstract

In this work, we present a computer code developed and named MCIS (Monte Carlo Collisions In Solids) in his first version allowing the study and determination of the structure properties (arrangement, vacancies, energy losses...) during ion implantation in an amorphous solid matrix. This code is based on both the binary collisions approximation (BCA) theory and statistical Monte Carlo method within C++ Builder environment. The properties of this code can be summarized as: simulate 92 chemical elements of periodic table, the energy of projectile tuned from 1eV to few MeV, variable angle of incidence projectile, it can simulated 4 layers with a maximum of 4 elements per layer, it can use of the electronic losses of energies by choose of Firsov or Robinson approximation, various interactions potentials such as the ZBL, Moliers and C-Kr. Possibility of choose of scattering phenomenon among the Magic Formula and the Rutherford scattering. The results generated by our code are very promising when compared to those given by SRIM (Stopping and Range of Ions in Matter) code along with the advantage that our code takes into account the effect of the interaction potential which is neglected in SRIM.

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