Abstract
In this work, an optimization algorithm was proposed for plasma diagnostic modeling based on a statistical analysis of reduced population density distribution. The algorithm generates a diagnostic equation, whose input parameters are the radiant flux of the multi-optical emission lines, and output parameters are electron temperature T e, electron density N e, and electron energy distribution function (EEDF), based on the dependence of reduced population density onT e, N e, and EEDF. The argon collisional-radiative model and the generalized EEDF were applied for the analysis of the excitation-kinetics. In this study, the diagnostic error for the low-pressure inductively coupled plasma, the low-pressure microwave discharge surface wave plasma, and the atmospheric dielectric barrier discharge plasma were simulated. The simulated diagnostic errors were smaller than those of the previously reported model.
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