Detrapping of tungsten nanoparticles in a direct-current argon glow discharge

Abstract

Nanoparticles are grown from the sputtering of a tungsten cathode in a direct current argon glow discharge. Laser light scattering of a vertical laser sheet going through the plasma reveals that the dust particle cloud is compressed and pushed towards the anode during the discharge. Scanning electron microscopy images of substrates exposed to the plasma for given durations show that dust particles are continuously falling down on the anode during the discharge. These observations are explained by the fact that the electrostatic force at the negative glow-anode sheath boundary cannot balance the ion drag, gravity, and thermophoresis forces for particles of more than a few tens of nanometres in diameter.