Abstract

The task of identifying nanodimensional inclusions with a structure coinciding with that of the surrounding matrix in transmission electron microscopy (TEM) images encounters considerable difficulties. Analysis of high-resolution TEM images requires a large volume of calculations and the exact knowledge of a large number of various parameters. The well-known method of determining coherent inclusion characteristics using dark-field images can be used only for relatively large objects. We describe a new method for determining the size and the crystal lattice misfit parameter using dark-field TEM images, which is applicable to coherent inclusions with dimensions as small as several nanometers.

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