Abstract
A procedure was developed for the analysis of 18 trace impurity elements in capacitor-grade tantalum powder (Ta), potassium tantalum fluoride (K2TaF7), and tantalum pentoxide (Ta2O5) using inductively coupled plasma optical emission spectrometry (ICP-OES). The detection limits achieved were in the ppb levels. The samples were dissolved in hydrofluoric acid (HF) in a microwave digestion system and the Ta matrix was extracted using cyclo hexanone. The impurity traces remained almost completely in the aqueous phase.
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