Abstract
The magnitude of spectral transmittance and reflectance is affected by the presence of inhomogeneity and interfacial roughness. Therefore, the methods, based on the magnitude of spectral transmittance and reflectance, are not adequate for the determination of thickness and optical constants of films with inhomogeneity and interfacial roughness. The present article proposes a method for the determination of thickness and refractive index using only the positions of the interference fringes in spectral transmittance and reflectance at two different angles of incidence. The proposed method is verified through numerical simulations, which result in <1% error for the film thickness. The complete parametrical dependence of spectral transmittance and reflectance of inhomogeneous film with rough interfaces on a substrate have been worked out for the film on transparent and opaque substrates, respectively. The spectrum envelopes have been solved simultaneously and the mathematical formulae are given for the determination of spectral scattering due to inhomogeneity and interfacial roughness for both transmittance and reflectance cases.
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