Abstract
Summary form only given. Using a 2.45 GHz microwave source, Ar-O/sub 2/ plasma was produced at atmospheric pressure in an azimuthally symmetric geometry. Optical emission spectroscopic method was used to measure the line-of-sight integrated emission spectrum at different microwave power and gas flow rate. A two-dimensional (r,z) distribution of the plasma density, electron temperature, and gas temperature was obtained by means of Abel inversion analysis. From the result, the effect of the ambient air on the atmospheric microwave plasma was investigated.
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