Determination of the surface form error of a spherical mirror with phase shifting Sagnac interferometer.

Abstract

A polarization Sagnac interferometer (SI) is used to produce two laterally separated, identical, convergent emergent beams with linear orthogonal polarizations. The emergent p-polarized and s-polarized beams converge toward their respective focal points. The test and reference spherical mirrors are placed at confocal positions with respect to the s and p focal points so as to normally reflect back the test and reference beams through the SI that recombines the test and reference waves. Polarization phase shifting interferometry is applied to obtain the surface form error of the test surface with respect to the reference surface. A two-step measurement procedure eliminates the system aberrations. Results obtained for a concave spherical test surface with respect to a convex spherical reference surface are presented. The optical configuration is relatively less susceptible to external mechanical vibration.