Abstract
The surface reactions of different energetic CHy molecules were studied using classical molecular dynamics. The sticking coefficient and the sputter yield of the different hydrocarbon species were studied for kinetic energies from 5 to 100 eV. Their dependence on the energy of the projectile and the angle of incidence are reported. Additionally, the results are compared with results from TRIM calculations on a similar system.
Full Text 
Sign-in/Register to access full text options
Sign-in/Register to access full text options 
Published version (
Free)
Free) 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a call
