Abstract
A standard specimen for verifying a spatial resolution of three-dimensional images obtained by X-ray computer tomography (XCT) system was developed to analyze in vivo behavior of implant materials. The standard material was made of a single crystal silicon block. There were 4 different kinds of dents on a surface of the block. These dents were dug in by focused ion beam (FIB) etching method. The shape of the dents was square with sides from 1 to 5 μm long. The height of the dents was about 5 μm Two-dimensional and three-dimensional images, obtained by a micro-focus XCT system, showed the existence of square dents with side 2 μm long and more in the standard specimen. Therefore the spatial resolution of the XCT system was determined to be about 2 μm. The developed standard specimen was proved to be useful for verifying the resolution with XCT systems.
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