Abstract

A simple method for determination of optical constants and thickness of semitransparent thin films deposited onto a transparent finite substrate has been developed. The method is based on the analysis of successive interference fringes of transmission spectra created by the films. It is essentially not necessary to obtain the envelope of transmission spectra in this method. The determined values of optical parameters are in good agreement with their true values used to generate transmission data. The accuracy of method in determining refractive index and thickness of the films is better than 1%.

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