Abstract
In Parts I and II the inelastic mean free path of electrons has been determined from their elastic scattering measured by elastic peak electron spectroscopy. The simple theoretical model based on the Thomas-Fermi-Dirac (TFD) atomic potential has been extended to higher kinetic energies. Theσ eff effective andσ τ total elastic scattering cross sections have been calculated forZ=2–50 atomic number andE=5–40 keV kinetic energy range. Theσ eff values deduced from Riley’s results are similar and agree within a factor of 2. The elastic differential cross sections determining also the angular distribution of elastic scattering are discussed for the TFD, screened Rutherford, Fink and Riley models. The application of elastic scattering is promising for scanning electron and Auger microscopy and for thin film in depth analysis using REELS and EPES. Some possibilities are briefly treated.
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