Abstract

X-ray fluorescence analysis procedure for determining a mass absorption coefficient in two-layer Co/Cr thin-film systems on polycor substrates has been proposed. Easy-to-make thin-film layers of sputtered cobalt on a polymer film substrate were used. Correction coefficients have been calculated that take into account
 the attenuation of the primary radiation of the X-ray tube and the absorption intensity of the analytical line of a bottom layer element in a top layer.

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