Determination of the macroscopic residual stress in thin film with fiber texture on the basis of local grain-interaction models

Abstract

Two local grain-interaction models (local Voigt and local Reuss models) were proposed to evaluate the macroscopic residual stress in thin film with fiber texture. The difference between the proposed models and traditional models was systematically discussed in theory and calculation. The X-ray stress factors of the two local models were deduced. The corresponding expressions of the macroscopic residual stress in thin film with fiber texture were obtained. As an example for experimental verification, X-ray diffraction measurements were performed on a sputtered platinum film. To demonstrate the dependability of the proposed local models, three reflections (3 1 1, 2 2 2 and 3 3 1) were considered in evaluating the macroscopic residual stress in the Pt film, and then consistent residual-stress values for these reflections were obtained based on the two proposed local models. This result indicates that both the proposed local models can be employed to evaluate the macroscopic residual stress in thin film with fiber texture.