Abstract

The optical diagnostics of an inductively coupled RF discharge in a magnetic field is considered. The radiative processes in the plasma are described by an extended corona equilibrium model. The temperature distribution of plasma electrons over the radius of the separator chamber is obtained using the line-ratio method for argon spectral lines (763.5/811.5, 451.1/811.5, 425.9/811.5 nm) and taking into account the excitation of levels from both the ground and metastable states. The results are compared with the data obtained by the electrostatic probe method.

Full Text
Published version (Free)

Talk to us

Join us for a 30 min session where you can share your feedback and ask us any queries you have

Schedule a call