Abstract
A set of electron collision cross-sections for the C4F6 molecule has been successfully determined for the first time by using an electron swarm method with a two-term approximation of the Boltzmann analysis. The set is evaluated by fitting the calculated electron drift velocities in pure C4F6 and in C4F6-Ar mixtures to the experimental data in the E/N range of 0.35 — 1200 Td (1 Td = 10−17 Vcm2), where E/N is the ratio of the electric field (E) to the neutral number density (N). The set is confirmed to be reliable due to our ability to reproduce satisfactorily the electron drift velocities in pure C4F6 and in 0.1, 0.5, 1, 5, and 10% C4F6-Ar mixtures with deviations of ±5%. The set may be the best available so far for use in the quantitative numerical modeling of a4 plasma discharge for various processing procedures with materials containing C4F6 molecules.
Published Version
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