Abstract

SUMMARY There is a clear advantage in using theoretical KAB factors to perform quantitative microanalysis, because they do not have to be experimentally determined. To compute KAB factors, we need a very good parameterization of ionization cross-sections. If the bnl parameter in the Bethe formula for the ionization cross-section is not a function of the element (A or B), then only the Cnl parameter is required to compute KAB factors. In this paper we present a new method to measure Cnl based on the ratio of KAB factors obtained at different accelerating voltages.

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