Abstract
For the research on elastic-plastic deformation characteristics of the echelle grating in the mechanical ruling depth range, a series of nanoindentation tests are completed about the deposited Al film of available echelle grating with a Berkovich indenter on a CSM nanoindentation instrument. Then a finite element analysis of the nanoindentation process is studied with an orthogonal experiment method for a series of given parameters containing the yield stress and strain-hardening exponent. The optimum combinations of yield stress and strain-hardening exponent are 200MPa and 0.1, which are got by the objective of the least absolute value of maximum loads deviation between the indentation test and the finite element analysis. Finally the elastic-plastic stress-strain curve of power function of the Al film is represented with the difference analysis from the orthogonal simulations.
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