Abstract
Knowledge of the energy loss of ions in matter is fundamental to many applications dependent on the transport of ions in matter, particularly ion implantation and ion beam analysis techniques such as Rutherford backscattering (RBS). We have devised a new method for the experimental determination of these stopping powers: we extract both the stopping powers and their uncertainties from RBS measurements with a Markov chain Monte Carlo method based on Bayesian inference. We have validated the method on a technologically important system in which the stopping powers axe already known to a good accuracy: namely backscattering of 4He off Si. We collected spectra with incident beam energy between 1 and 3 MeV, and determined the stopping power of 4He in Si in an energy range 0.5-3 MeV.
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