Abstract

We propose a method for using reflection high-energy electron-diffraction (RHEED) measurements to determine step-adatom kinetics during growth by step flow. Analytical results are obtained for the adatom sticking coefficients at the steps in terms of the steady-state in-phase RHEED specular intensity at two distinct misorientations. Calculated results based on estimated values for these intensities in the step-flow regime indicate the presence of a pronounced barrier at the down step, providing support for previous conjectures. Extension of these results to lower temperatures, including the region below the critical temperature where the majority of RHEED studies reported have been made, should be possible but will involve calculations of a more complicated nature.

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