Determination of scattering structures from spatial coherence measurements

Abstract

A new method of structure determination and microscopic imaging with short-wavelength radiations (charged particles, X-rays, neutrons), based on measurements of the modulus and the phase of the degree of spatial coherence of the scattered radiation, is developed. The underlying principle of the method — transfer of structural information about the scattering potential via spatial coherence of the secondary (scattering) source of radiation formed by this potential — is expressed by the generalization of the van Cittert-Zernike theorem to wave and particle scattering [ A.M. Zarubin, Opt. Commun. 100 (1993) 491; Opt. Commun. 102 (1993) 543]. Shearing interferometric techniques are proposed for implementing the above measurements; the limits of spatial resolution attainable by reconstruction of the absolute square of a 3D scattering potential and its 2D projections from the measurements are analyzed. It is shown theoretically that 3D imaging with atomic resolution can be realized in a “synthetic aperture” electron or ion microscope and that a 3D resolution of about 6 nm can be obtained with a “synthetic aperture” X-ray microscope. A proof-of-principle optical experiment is presented.