Abstract

Surface ellipsometry involves measurement of the ratio of eigenvalues (reflection coefficients) associated with the orthogonal linear eigenpolarization parallel and perpendicular to the plane of incidence. This paper shows that the ratio of complex eigenvalues of any optical system with known arbitrary eigenpolarizations can be determined, with equal ease, using the same ellipsometer arrangements of surface ellipsometry. Expressions are derived that give the ratio of eigenvalues as a function of (1) the Cartesian complex polarization variables that describe the eigenpolarizations, (2) a set of nulling angles in the symmetrical PC1SC2A or asymmetrical PCSA and PSCA ellipsometer arrangements, (3) the slow-to-fast complex relative transmittance of the compensator(s). The results are applied to the ellipsometric measurement of optical rotatory dispersion and circular dichroism.

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