Abstract
It has been shown for the first time that implementation of the L-curve approach to choose the regularization parameter for Laplace DLTS significantly increases the reliability of the data obtained. The possibility of considerable reduction of the mechanical stress necessary for energy level splitting in determination of the defect symmetry due to the increase in the Laplace DLTS resolution is shown by the example of the wellknown point radiation defect: oxygen-vacancy complex (A center) in a CzSi crystal.
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