Abstract
A Luus-Jaakola optimization procedure is described that simultaneously determines the optical constants, thickness and root mean square roughness of thin films for reflectance versus angle-of-incidences data measured in the EUV/soft X-ray region. The optimization method is applied to different films at different wavelengths. The results show that the Luus-Jaakola optimization procedure is able to determine the thickness of films and the roughness with an accuracy of less than 7%. The optical constants obtained are also in good agreement with reported values for films having an error of less than 1%.
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