Determination of non-homogeneous high-concentration depth distributions using elastic backscattering data

Abstract

A computer program has been developed by which the depth concentration distribution of a two-element bulk sample can be determined from elastic backscattering data. The presented calculative procedure can be applied to non-homogeneous high concentrations, where the composition variation as a function of depth has to be considered to obtain correct distributions. Two samples with different compositions, nitrogen in titanium and gold in silicon, were analysed with 2MeVH+ and He+ ions, respectively, to illustrate the versatility of the calculative program.