Abstract
A technique for quantifying nitrogen in thin films using the 14N(α, p) 17O reaction is reported. An incident alpha particle beam with energy near 3.9 MeV is used and emitted protons are detected at a lab angle of 135°. A 15 μm Kapton foil is placed over the detector to stop elastically scattered alpha particles. A thin film containing a known areal density of nitrogen is used for calibration. We present relative yield data on protons from the 14N(α, p 0) 17)O reaction at 135° lab angle from 3.4 MeV to 4.0 MeV as well as an example of the application of this technique in determining nitrogen content in thin films. Possible interfering reactions, particularly 28Si(α, p) 31, are also discussed.
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