Abstract
Non-Rutherford proton backscattering has been employed for the determination of the nitrogen content in TiN layers of a thickness of several micrometres deposited on a steel backing. The required proton scattering cross section has been measured using standards comprising thin TiN films on a light substrate. The scattering cross section of 2 MeV protons of nitrogen for θ lab = 160° was found to be 5.7 times the Rutherford value. Nitrogen detection limits in thick TiN samples are discussed.
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