Determination of Na acceptor level in Na+ ion-implanted ZnO single crystal

Abstract

Ion implantation was used to dope Na acceptor into ZnO single crystals. With three mixed implantation energies, uniform depth distribution of Na ion in the surface region (~300 nm) of ZnO bulk crystals is achieved. Via post-implantation annealing, a donor–acceptor pair recombination band is identified in the low-temperature photoluminescence spectra, from which the energy level of Na-related acceptor in single crystalline ZnO is estimated to be 300 meV. A p–n junction based on this ZnO–Na layer shows rectifying characteristics, confirming the p-type conductivity.