Abstract
A method for determination of the metastable atom concentration in high pressure (>100 Torr) high density (> 1012cm23); helium plasma from current–voltage characteristics of a single electrostatic probe is described. It is shown, that the flux of metastable atoms to the probe is controlled by ion sheath thickness and consequently by probe bias. The method for calculation of metastables concentration from the negative part of the current–voltage probe characteristics is proposed. The metastables concentrations measured in pulsed microwave discharge are in agreement with values calculated from the metastable balance equation.
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