Abstract
A sputtering technique was applied to the decomposition of sintered fine ceramics for contamination-free analysis. Alumina-, zirconia- and lanthanum-doped lead zirconate titanates (PLZT) prepared as sputtering target were converted into thin films on a quartz plate by r.f. sputtering. The sample films were dissolved in hydrochloric or sulphuric acid as easily as the powdered samples. Major, minor and trace elements were determined by inductively coupled plasma atomic emission spectrometry (ICP-AES). The analytical results for alumina and zirconia agreed well with the original target composition under wide sputtering conditions, but it was necessary to optimize the r.f. power used in the sputtering process and the sputtering gas pressure for PLZT analysis. The relative standard deviations were approximately 1% for major 1–3% for minor and 3–8% for trace components.
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