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Abstract
Determination of molecular temperatures within inductively coupled plasmas is critical to understanding the reactions that drive the chemistry of these systems and the mechanisms involved in surface processing. To investigate such interactions, a dual, in situ broadband absorption and optical emission spectroscopy system was designed; providing insight into neutral and excited state species energetics, specifically rotational (TR) and vibrational (TV) temperatures across a broad spectral range (>800 nm). Nitric oxide plasmas have been investigated, where measured TV values were higher than TR values, indicating rotational degrees of freedom are more easily thermalized. Using the imaging of radicals interacting with surfaces technique, surface scatter coefficients were measured for NO radicals, which are discussed in relation to energy partitioning in these systems.
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