Abstract
By using the 15N nuclear reaction analysis (NRA) technique the hydrogen concentrations in 6H–SiC epilayers were determined and compared with the results of infrared (IR) absorption measurements. Both methods found similar hydrogen concentration. The hydrogen depth profile measured by the NRA technique is shown. The NRA spectra show hydrogen concentrations that remain constant for depths larger than 150 nm. The measured bulk concentrations for the two SiC epilayers are 1.4 × 10 20 and 2.5 × 10 20 hydrogen atoms/cm 3.
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