Abstract
The scanning probe microscopy (SPM) technique has been used in its atomic force microscopy (AFM) and lateral force microscopy (LFM) modes, in order to characterize morphologically and to determine the friction coefficient, respectively, for coatings of TiN and ZrN thin films. The measure on the friction coefficient shows that although these films have similar physical and chemical properties, they present a difference in their friction coefficient, showing that TiN presents a higher friction coefficient than ZrN. Using X-ray diffraction (XRD), the coatings were characterized structurally. Chemical states of the TiN and ZrN films were determined by X-ray photoelectron spectroscopy (XPS).
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