Abstract

The determination of fluid density and viscosity using most cantilever-based sensors is based on changes in resonant frequency and peak width. Here, we present a wave propagation analysis using piezoelectrically excited micro-cantilevers under distributed fluid loading. The standing wave shapes of microscale-thickness cantilevers partially immersed in liquids (water, 25% glycerol, and acetone), and nanoscale-thickness microfabricated cantilevers fully immersed in gases (air at three different pressures, carbon dioxide, and nitrogen) were investigated to identify the effects of fluid-structure interactions to thus determine the fluid properties. This measurement method was validated by comparing with the known fluid properties, which agreed well with the measurements. The relative differences for the liquids were less than 4.8% for the densities and 3.1% for the viscosities, and those for the gases were less than 6.7% for the densities and 7.3% for the viscosities, showing better agreements in liquids than in gases.

Highlights

  • Viscosity and density are the fundamental properties of a fluid, and their measurements are important in many applications, from the quality control of combustible gases [1] to blood coagulation tests [2]

  • We propose an alternative method to determine the density and viscosity of a fluid using a wave propagation analysis for piezoelectrically excited microscale- and nanoscale-thickness cantilevers depending on their sensitivities in a gas or a liquid

  • We presented an analternative alternativemethod methodtoto measure density viscosity of liquids

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Summary

Introduction

Viscosity and density are the fundamental properties of a fluid, and their measurements are important in many applications, from the quality control of combustible gases [1] to blood coagulation tests [2]. The density and viscosity of a fluid are obtained from a change in resonant frequency and peak width (or quality factor) when the cantilever is immersed in the fluid These cantilevers were approximated as vibrating spheres in a viscous environment [5,9], or the hydrodynamic function [11] was used to account for the real geometry of the cantilevers [4,10], which allows the multimode analysis, but places a restriction in the frequency range and an added mass on the cantilever. We propose an alternative method to determine the density and viscosity of a fluid using a wave propagation analysis for piezoelectrically excited microscale- and nanoscale-thickness cantilevers depending on their sensitivities in a gas or a liquid. The fluid-structure interactions and the Sensors 2017, 17, 2466; doi:10.3390/s17112466 www.mdpi.com/journal/sensors wave propagation on the cantilevers partially and totally immersed in viscous fluids were analyzed analysis for the piezoelectrically excited microscaleandand nanoscale-thickness cantilevers depending on to calculate transfer functions of the microscalenanoscale-thickness cantilevers in liquids their sensitivities in a gas or a liquid

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