Abstract

A new algorithm is described for the calculation of electron number density ( n e) via least-squares fittings of spectral lines to the theoretical Stark-broadened profiles. The range of measurement is limited only by the resolution of the spectrometer and the availability of spectral data. Electron number densities for helium and argon inductively coupled plasmas are determined by using H-beta line emitted at 486.13 nm. The effective n e, value of the He ICP (4.8 × 10 13 cm −3) is approximately 25 times less than that of the Ar ICP (1.2 × 10 15 cm −3) when the plasmas are operated under typical analytical conditions. Advantages of the present method over other methods are discussed.

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