Abstract

Measurement of dissolved chromium concentration in p-type crystalline silicon by means of the change in carrier lifetime due to chromium-boron pair dissociation requires precise knowledge of the recombination parameters of dissolved chromium in silicon. This work, based on quasi-steady-state carrier lifetime measurements, aims to determine the value at 300K of the hole capture cross section of the chromium-boron pairs in p-type silicon, which is the only recombination parameter still unknown at this temperature. The complete knowledge of the recombination parameters allows the determination of dissolved chromium concentrations in p-type silicon as low as 1010cm−3, even when chromium atoms do not dominate carrier recombination.

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