Abstract
Energy-dispersive X-ray spectrometry offers the opportunity for a fast and reliable determination of the composition of a specimen. For fundamental parameter based quantification, detailed knowledge of the X-ray generation cross sections and of the detection system’s efficiency is required. The detection efficiency is determined comparing the measured and calculated spectrum of undispersed synchrotron radiation (SR) from the electron storage ring BESSY II in the spectral range from 0.1 keV to 100 keV. Alternatively, monochromatized SR in the spectral range from 0.1 keV to 60 keV is used to determine the detection efficiency with a typical relative uncertainty of 1% to 2% by direct comparison with a reference detector. Employing well-calibrated detectors and monochromatized SR of well-known radiant power and high spectral purity, fluorescence yields have been investigated and resonant Raman scattering was studied as an example of a basic effect creating spectral background.
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