Abstract
We fabricated high quality Nb/Al/AlOx/Al/Nb superconducting tunnel junction (STJ) detectors in RIKEN, and succeeded detecting single optical photons. The normal resistance of the STJ device was 2×10−6Ωcm2 and the ratio of normal resistance and dynamic resistance (Rn/Rd) at 0.2mV was 10−5 operated at 0.35K. The intrinsic energy resolution for 2.64eV(470nm) photon was 1.0eV. Good linearity was observed.
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