Abstract

A new method using the static electricity distribution is proposed for noncontact detection of moisture adsorption on an object surface. The static electricity distribution with high spatial resolution over a short period of time was measured by scanning a vibrating array sensor with 30 parallel flat-plate electrodes along the object surface. Measurement of the local charge was demonstrated by using the sensor. It is possible to detect the influence of moisture adsorption over an entire object surface by observing the changes in the static electricity distribution over time.

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