Abstract
A linear time-of-flight mass spectrometer (TOF-MS) has been constructed to measure mass distribution of negatively-charged clusters formed in the hot filament diamond chemical vapor deposition (CVD) process and in the metal evaporation. A conversion dynode made of CsI was employed to enhance detection efficiency of the large clusters greater than 10 000 amu. An atomic peak from the tungsten evaporation was used for the mass calibration of the carbon clusters. The carbon clusters produced in the CVD diamond process was loosely bound so that they were easily fragmented during passage through accelerating electric fields. The mass distribution measured with the TOF-MS system showed much less abundance of large clusters than those measured previously with the energy analyzer and Wien filter.
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