Abstract
This paper presents a new detection method of cyclic-fold bifurcations in electrostatic MEMS transducers based on a variant of the harmonic detection of resonance method. The electrostatic transducer is driven by an unbiased harmonic signal at half its natural frequency, ωa = 1/2 ωo. The response of the transducer consists of static displacement and a series of harmonics at 2 ωa, 4 ωa, and so on. Its motion-induced current is shifted by the excitation frequency, ωa, to appear at 3 ωa, 5 ωa, and higher odd harmonics, providing higher sensitivity to the measurement of harmonic motions. With this method, we successfully detected the variation in the location of the cyclic-fold bifurcation of an encapsulated electrostatic MEMS transducer. We also detected a regime of tapping mode motions subsequent to the bifurcation.
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